연구자 소개
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Temperature Uniformity Control of 12-Inch Semiconductor Wafer Chuck Using Double-Wall TPMS in Additive Manufacturing
Materials 참여저자 20250106 -
Optimal design of gyroid solid-TPMS structures for 8-inch wafer prober lower chuck in additive manufacturing
Journal of Mechanical Science and Technology 참여저자 20240905 -
Optimization study on the uniform temperature of an additively manufactured cooler for a semiconductor heating device
Applied Themral Engineering 제1저 20230207